Product
Precision stage > Alignment stage
SMX
High-precision alignment stage capable of X-Y, θ multiple motions on the same plane
Precision stage line-up
Features
- Compact structure Simple structure that enables straight and rotational movement without base and tabletop saddle
- Modularization of driving elements Gaining competitiveness for customer response through modularization and standardization of driving elements applied with cross-roller bearing and LM guide
- Large design Standardizing the tabletop size to 1,500 mm x 1,500 mm, customizing the tabletop size according to the number of modules to satisfy customers' requirements
- Hollow structure Machining holes on the centers of the base and tabletop for easy mounting of optical measuring instruments
Specifications
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| Model No. | Table size | Base size | Repetition accuracy (㎛) |
Nominal load capacitiy (kg) |
Motor capacity (w) |
|
|---|---|---|---|---|---|---|
| SMX05 | 15 | 150X150 | 200X200 | ± 1 | 15 | 50 |
| SMX10 | 20 | 200X200 | 300X300 | 20 | 100 | |
| 25 | 250X250 | 350X350 | 60 | 100 | ||
| 35 | 350X350 | 450X450 | 60 | 100 | ||
| SMX20 | 40 | 400X400 | 500X500 | 100 | 200 | |
| 50 | 500X500 | 600X600 | 100 | 200 | ||
| 75 | 750X750 | 850X850 | 100 | 200 | ||
| SMX30 | 100 | 1000X1000 | 1200X1200 | 300 | 400 | |
| 150 | 1500X1500 | 1700X1700 | 300 | 400 | ||
*Detailed specifications are different for each type, so please check the catalog.
Option
Table size options
Options of driving axis number
Sensor option
Raydent options
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