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정밀 스테이지 > 단축스테이지

자바라 타입 커버 적용으로 외부 이물질로부터 구동부 보호가 가능한 고정밀 직교 STAGE

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얼라인먼트 스테이지 SMX 단축스테이지 TX

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제품 사양

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제품 사양 내용
제품군	규격	스트로크 (mm)	가반하중(kg)	(W)	Precision grade	반복정밀도(mm)	위치결정정도 (mm)	주행직진도 (mm)
TX Single-axis stage	TX05	50	30	100	P6	± 0.003	0.025	0.008
	TX10	100			P5	± 0.002	0.015	0.004
	TX15	150			P4	± 0.001	0.006	0.002
	TX20	200	100	200	P6	± 0.003	0.032	0.01
	TX25	250			P5	± 0.002	0.02	0.005
	TX30	300			P4	± 0.001	0.008	0.003
	TX40	400	250	400	P6	± 0.003	0.05	0.015
	TX40	400			P5	± 0.002	0.025	0.007
	TX40	400			P4	± 0.001	0.013	0.004
	TX50	500			P6	± 0.003	0.05	0.015
	TX50	500			P5	± 0.002	0.025	0.007
	TX50	500			P4	± 0.001	0.013	0.004
TX Single-axis stage Javara type	TX05J	50	30	100	P6	± 0.003	0.025	0.008
	TX10J	100			P5	± 0.002	0.015	0.004
	TX15J	150			P4	± 0.001	0.006	0.002
	TX20J	200	100	200	P6	± 0.003	0.032	0.01
	TX25J	250			P5	± 0.002	0.02	0.005
	TX30J	300			P4	± 0.001	0.008	0.003
	TX40J	400	250	400	P6	± 0.003	0.05	0.015
	TX40J	400			P5	± 0.002	0.025	0.007
	TX40J	400			P4	± 0.001	0.013	0.004
	TX50J	500			P6	± 0.003	0.05	0.015
	TX50J	500			P5	± 0.002	0.025	0.007
	TX50J	500			P4	± 0.001	0.013	0.004
TX XY stage	TX0505	50X50	15	100	P6	± 0.003	0.03	0.01
	TX0510	50X100			P6	± 0.003	0.03	0.01
	TX0515	50X150			P5	± 0.002	0.015	0.005
	TX1010	100X100			P5	± 0.002	0.015	0.005
	TX1015	100X150			P4	± 0.001	0.007	0.003
	TX1515	150X150			P4	± 0.001	0.007	0.003
	TX2020	200X200	50	200	P6	± 0.003	0.04	0.025
	TX2025	200X250			P6	± 0.003	0.04	0.025
	TX2030	200X300			P5	± 0.002	0.02	0.007
	TX2525	250X250			P5	± 0.002	0.02	0.007
	TX2530	250X300			P4	± 0.001	0.01	0.004
	TX3030	300X300			P4	± 0.001	0.01	0.004
	TX4040	400X400	100	400	P6	± 0.003	0.06	0.04
	TX4050	400X500			P5	± 0.002	0.03	0.01
	TX5050	500X500			P4	± 0.001	0.015	0.005
TX XY stage Javara type	TX0505J	50X50	15	100	P6	± 0.003	0.03	0.01
	TX0510J	50X100			P6	± 0.003	0.03	0.01
	TX0515J	50X150			P5	± 0.002	0.015	0.005
	TX1010J	100X100			P5	± 0.002	0.015	0.005
	TX1015J	100X150			P4	± 0.001	0.007	0.003
	TX1515J	150X150			P4	± 0.001	0.007	0.003
	TX2020J	200X200	50	200	P6	± 0.003	0.04	0.025
	TX2025J	200X250			P6	± 0.003	0.04	0.025
	TX2030J	200X300			P5	± 0.002	0.02	0.007
	TX2525J	250X250			P5	± 0.002	0.02	0.007
	TX2530J	250X300			P4	± 0.001	0.01	0.004
	TX3030J	300X300			P4	± 0.001	0.01	0.004
	TX4040J	400X400	100	400	P6	± 0.003	0.06	0.04
	TX4050J	400X500			P5	± 0.002	0.03	0.01
	TX5050J	500X500			P4	± 0.001	0.015	0.005